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The purpose of this paper is to study the magnetomechanical characteristic of a microsensorwhich is composed of a cantilevered beam-plate with ferromagnetic films in order to measure the magneticfield from the deformation of plate when the microsensor is located in the magnetic field.To this end,a nu-merical approach made up of the finite element method for magnetic field and the finite difference method fordeflection of the microsensor is proposed to perform the numerical analysis of deflection under magnetoelasticinteraction.Some quantitative results of a case study for the magnetoelastic characteristic between the mag-netic field and deflection of the microsensor in the magnetic field are given.The results show that this mi-crosensor can be used not only to measure the magnitude of magnetic intensity,but also to possibly monitorthe direction of the vector of the magnetic field.
The purpose of this paper is to study the magnetomechanical characteristics of a microsensorwhich is composed of a cantilevered beam-plate with ferromagnetic films in order to measure the magneticfield from the deformation of plate when the microsensor is located in the magnetic field.To this end, a nu-merical approach made up of the finite element method for magnetic field and the finite difference method for definition of the microsensor is proposed to perform the numerical analysis of deflection under magnetoelasticinteraction .ome quantitative results of a case study for the magnetoelastic characteristic between the mag -netic field and deflection of the microsensor in the magnetic field are given. The results show that this mi-crosensor can be used not only to measure the magnitude of magnetic intensity, but also to possibly monitorthe direction of the vector of the magnetic field.