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本文采用MOCVD技术制备了薄膜型Fe_2O_3气敏元件。测定了元件的物理性能和气敏特性。该气敏元件对乙醇、丙酮和液化石油气有较高的灵敏度,响应时间快,对甲烷、管道煤气、硫化氢等气体不敏感,具有一定的选择性。还考查了元件的稳定性。
In this paper, MOCVD film-type Fe 2 O 3 gas sensor was prepared. The physical properties and gas sensing properties were measured. The gas sensor for ethanol, acetone and liquefied petroleum gas has a higher sensitivity, fast response time, methane, pipeline gas, hydrogen sulfide and other gases are not sensitive, with a certain selectivity. Also examined the stability of the components.