日本某家计测控制系统公司研制成功一种比老产品精度高10倍的表面检查装置,商品名为“Laser profiler”。该装置使用红外激光,能以0.01μm量级的精度测定物质表面处的凹凸。当激光照到被检物质上,经反射回来的干涉波由工作站进行数字分析,查出表面粗糙度。激光的调焦和整个物体的倾斜修正等均自动控制,测量结果在显示屏上放大显示。一次能测量的区间为100nm。据称,测量时间仅为迄今的1/10 Japan, a measurement control system company successfully developed a 10 times higher than the accuracy of the old product of the surface inspection device, trade name “Laser profiler.” The device uses an infrared laser to measure irregularities at the surface of a substance with a precision on the order of 0.01 [mu] m. When the laser shines on the test substance, the interference wave reflected back by the workstation for digital analysis to detect the surface roughness. Laser focus and tilt correction of the entire object are automatically controlled, the measurement results on the display magnified. A measurable interval of 100nm. Allegedly, the measurement time is only 1/10 so far