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光学读出红外热成像系统中,焦平面阵列(FPA)反光板的初始弯曲降低了系统的光学检测灵敏度。针对FPA的设计制作,提出了两种降低其反光板初始弯曲的优化设计方案:减薄反光板上金层厚度和制作带加强筋的反光板。在理论分析的基础上,设计制作了单元尺寸为200μm的反光板金层减薄FPA,其反光板曲率半径提高至原来金层未减薄FPA的4.71倍,系统光学检测灵敏度提高了5.2倍;单元尺寸为60μm的反光板带加强筋FPA,其反光板曲率半径提高至原来没有加强筋FPA的4.29倍,系统光学检测灵敏度提高了1.18倍。实验验证了理论分析的结果。
In optical readout infrared thermal imaging systems, the initial bending of FPA reflectors reduces the optical detection sensitivity of the system. According to the design and manufacture of FPA, two optimized design schemes to reduce the initial bending of the reflector are proposed: thinning the thickness of the gold layer on the reflector and making reflector with stiffener. On the basis of theoretical analysis, the FPA with a unit size of 200μm is designed and fabricated, the curvature radius of the reflector is increased to 4.71 times that of the original unlabeled FPA, and the optical detection sensitivity of the system is improved by 5.2 times. Reflector with a size of 60μm with stiffener FPA, the reflector radius of curvature increased to 4.29 times the original without stiffener FPA, the system optical detection sensitivity increased by 1.18 times. Experimental results verify the theoretical analysis.