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Transparent ZnO and Zn0.9(Co1-xSmx)0.1O (x=0.0, 0.10, 0.20, 0.30, 0.40, 0.50, 0.60, 0.70, 0.80, 0.90, 1.0) films were prepared by sol-gel method. For the prepared Zn0.9(Co1-xSmx)0.1O systems, the influences of dopant concentration of Sm on the structural