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本专利是关于气·湿敏传感器的制造方法的说明·也就是在电绝缘片上,形成一种由平均粒径是10～100多埃((?))的金属氧化物超细粒子组成的并经氧等离子作用生成活性的电阻膜。由于这活性电阻膜的电阻具有与被测气体的种类和浓度的不同而不同的特征。因此,可以用来制作检测水蒸气、气体的气。湿敏传感器。 下面,以锡这种超细粒子所形成的氧化锡膜制成的气·湿敏传感器的制造方法来加以说明。
This patent is a description of the manufacturing method of the gas-moisture sensor, that is, on the electrical insulating sheet, a metal oxide ultrafine particle having an average particle diameter of 10 to 100 angstroms (? Oxygen plasma generated by the active resistance of the film. Since the resistance of this active resistance film has different characteristics depending on the kind and concentration of the gas to be measured. Therefore, it can be used to make the detection of water vapor, gas gas. Humidity sensor. Next, a method of producing a gas-moisture sensor made of a tin oxide film formed of ultra-fine particles of tin will be described.