论文部分内容阅读
研制了一台高频离子源 ,通过实验调试取得了引出电压、聚焦电压及放电气压对引出束流影响的变化曲线 ,从而获得高频离子源的最佳工作条件 ,并测定了引出束流的束径包络
A high-frequency ion source was developed. The curve of the influence of extraction voltage, focusing voltage and discharging pressure on the outgoing beam current was obtained by experimental debugging. The optimum working conditions of the high frequency ion source were obtained. Bundle envelope