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通过对MoSi2发热元件的微观结构分析,探讨影响使用性能的微观因素。研究发现MoSi2结晶相细小,尤以Al、Si等为主的氧化物组成的玻璃相细薄、分布均匀,孔洞少是提高使用性能的必要条件。Mo5Si3相的存在,玻璃相形状、分布均影响MoSi2晶粒的生长和断裂行为。MoSi2发热元件上生成的表面膜实际上是一种复合硅酸盐玻璃膜。
By analyzing the microstructure of MoSi2 heating element, the microscopic factors affecting the performance are discussed. It is found that MoSi2 crystal phase is fine, especially the glass phase composed of oxides mainly composed of Al, Si and the like is thin and uniform, and the holes are few and necessary to improve the performance. The existence of Mo5Si3 phase and the shape and distribution of glass phase all affect the growth and fracture behavior of MoSi2 grains. The surface film produced on a MoSi2 heating element is actually a composite silicate glass film.