在近年来迅速发展的微细加工技术中,表面膜层厚度的测量是十分重要的问题。本文提出一种新方法,它利用迈克耳逊干涉光路,通过对膜层前后两表面反射光束和来自另一臂的反射光束产生的两组白光干涉纹黑线间隔的测量,即可得到表面膜层的厚度、这种测量方法迅速、简便、设备简单、精确度高、不损伤膜层表面,适合在实验室和工厂广泛应用。 In the rapid development of microfabrication technology in recent years, the measurement of surface film thickness is a very important issue. In this paper, a new method is proposed, which uses the Michelson interference optical path to obtain the surface film by measuring the black line spacing of two white interference fringes produced by the reflected light beams on the front and the back of the film and the reflected light beam from the other arm Layer thickness, this measurement method is rapid, simple, simple equipment, high precision, does not damage the surface of the film, suitable for a wide range of applications in laboratories and factories.