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采用Ｐ－偏振傅里叶变换红外反射吸收光谱技术，实现了对溅射型电子回旋共振微波等离子体技术制备的超薄ＳｉＯ_２ 薄膜的实时监测和表征．实验表明：该方法是一种无损伤性、快速而准确的实时分析ＳｉＯ_２薄膜质量的有效方法。
P-polarization Fourier transform infrared absorption spectroscopy was used to realize the real-time monitoring and characterization of ultra-thin SiO 2 thin films prepared by sputtering electron cyclotron resonance microwave plasma. Experiments show that this method is an effective, nondestructive, rapid and accurate method for real-time analysis of the quality of SiO_2 films.