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This paper proposes a reasonable radiation-resistant composite channel structure for InP HEMTs.The simulation results show that the composite channel structure has excellent electrical properties due to increased modulation doping efficiency and carrier confinement.Moreover,the direct current (DC) and radio frequency (RF) characteristics and their reliability between the single channel structure and the composite channel structure after 75-keV proton irradiation are compared in detail.The results show that the composite channel structure has excellent radiation tolerance.Mechanism analysis demonstrates that the composite channel structure weakens the carrier removal effect.This phenomenon can account for the increase of native carrier and the decrease of defect capture rate.