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IMEC宣布,成功利用ASML的EUV(extremeultraviolet)曝光装置NXE:3100进行曝光。该EUV曝光装置配备了日本牛尾电机的全资子公司德国XTREMEtechnologiesGmbH公司生产的LA-DPP(laserassisted dischargeprodu cedplasma)方式EUV光源。IMEC于2011年3月导入了曝光装置单机和EUV光源,设置于研究设施内
IMEC announced the successful exposure to ASML’s extreme ultraviolet exposure unit NXE: 3100. The EUV exposure device is equipped with LA-DPP (laserassisted dischargeproducedsplasma) EUV light source manufactured by XTREME TechnologiesGmbH, a wholly owned subsidiary of Nippon Steel Motor. IMEC introduced the exposure unit stand-alone and EUV light source in March 2011 and was installed in the research facility