Optimization of the curing process can not control the deformation of composite part prepared in autoclave accurately. And traditional ＂trial-and-error＂ tool surface compensation approach is low efficiency, high cost and can not control part deformation quantificationally. In order to address these issues, tool compensation approach based on FEA is presented. Model of multi-field coupling relationship in autoclave is realized. And finite element analysis model of composite part＇s curing process is developed to analyze part deformation. According to displacement of the part surface nodes after deformation, tool surface which compensated by the displacement of composite part which analyzed by FEA is used to control part deformation. A cylindrical composite part is ana- lyzed to verify the approach, and the result proves the correctness and validity of the approach.