以薄膜光学的干涉理论和衍射光学的傅里叶模式理论为基础,给出了0·8μm飞秒激光器用多层介质膜脉宽压缩光栅的理论设计;设计采用H3L(HL)^9H0·5L2·4H的多层介质膜为基底,当刻蚀后表面浮雕结构的占宽比为0·35,线密度为1480线/mm,槽深为0·2μm,顶层HfO2的剩余厚度为0·15μm时,对于Littrow角度(36·7°)和TE波模式入射的衍射光栅其-1级衍射效率达到95%以上. Based on the theory of thin film optical interference and the theory of Fourier mode of diffractive optics, the theoretical design of pulse width compression grating for multilayer 0.8μm femtosecond laser is given. The design of the system is H3L (HL) ^ 9H0.5L2 4H multilayer dielectric film as a substrate, when the surface relief structure after etching occupancy ratio of 0.35, a linear density of 1480 lines / mm, a groove depth of 0.2 μm, the remaining thickness of the top layer of HfO2 is 0.15 μm , The diffraction efficiency of -1 order diffraction reaches more than 95% for the incident diffraction grating with Littrow angle (36 · 7 °) and TE mode.