由于极其优良的热学和光学性能,纳米金刚石薄膜极有可能应用于背投电视的激光光学窗口。文章通过在热丝辅助化学气相沉积法中采用偏压增强成核(BEN-HFCVD) ,成功地在(100)硅衬底上制得了适于作为光学窗口的高质量的光学级纳米金刚石薄膜,采用的偏压为-30 V。通过表征制备的纳米金刚石薄膜,发现它具有光滑的表面,表面均方根粗糙度(RMS)约为10 nm,并且对自支撑纳米金刚石薄膜进行透射光谱分析得到其透射率达到了50 %。 Due to their extremely good thermal and optical properties, nanodiamond films are most likely to be used in the laser optical window of rear-projection televisions. By using BEN-HFCVD in hot wire assisted chemical vapor deposition (CVD) method, high-quality optical grade nanodiamond films suitable as optical windows were successfully fabricated on (100) The bias voltage used is -30 V. The prepared nanodiamond film was characterized by its smooth surface, root mean square roughness (RMS) of about 10 nm, and transmittance of 50% of the self-supporting nanodiamond film.