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为了探究CF4/SF6反应气体及其含量对大气压等离子体的温度的影响规律,采用红外热像仪记录等离子体反应区域的温度。实验结果表明在系统输入功率为260W时,对于CF4气体,等离子体区域的温度随着CF4含量的增加先升高然后降低;对于SF6气体,等离子体区域的温度随着SF6含量的增加而逐渐降低;在相同条件下,反应气体为SF6时等离子体区域的温度比反应气体为CF4时的等离子体的温度高。
In order to investigate the influence of CF4 / SF6 reaction gas and its content on atmospheric pressure plasma temperature, the temperature of the plasma reaction zone was recorded by infrared thermal imager. The experimental results show that the temperature of the plasma region increases and then decreases with the increase of CF4 content at the input power of 260 W for the CF4 gas. For the SF6 gas, the temperature of the plasma region gradually decreases with the increase of the SF6 content ; Under the same conditions, the temperature of the plasma region when the reaction gas is SF6 is higher than the temperature of the plasma when the reaction gas is CF4.