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In this paper,we present the simulation and fabrication of a thin film bulk acoustic resonator(FBAR).In order to improve the accuracy of simulation,an improved Mason model was introduced to design the resonator by taking the coupling effect between electrode and substrate into consideration.The resonators were fabricated by the eight inch CMOS process,and the measurements show that the improved Mason model is more accurate than a simple Mason model.The Q_s(Q at series resonance),Q_p(0 at parallel resonance),Q_(max) and k_t~2 of the FBAR were measured to be 695,814,1049,and 7.01%respectively,showing better performance than previous reports.
In this paper, we present the simulation and fabrication of a thin film bulk acoustic resonator (FBAR). In order to improve the accuracy of simulation, an improved Mason model was introduced to design the resonator by taking the coupling effect between electrode and substrate into consideration. The resonators were fabricated by the eight inch CMOS process, and the measurements show that the improved Mason model is more accurate than a simple Mason model. Q_s (Q at series resonance), Q_p (0 at parallel resonance), Q_ ( max) and k_t ~ 2 of the FBAR were measured to be 695,814,1049, and 7.01% respectively, showing better performance than previous reports.