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薄膜热电传感器由于具有体积小、热容量小及响应速度快等优点成为国内外学者研究的重点。现有的薄膜制备工艺不成熟,一致性差,效率低,制备成本高,所以现在多针对特殊领域的研究,难以产品化和推广。提出了一种基于电子印刷工艺制备薄膜热电传感器的新方法,该方法克服了以往工艺的弊端,为热电传感器的微型化、高速化、集成化发展提供了新的研究方向。
Thin-film thermoelectric sensors have become the focus of domestic and foreign scholars due to their small size, small heat capacity and fast response. The existing thin film preparation technology is immature, the consistency is poor, the efficiency is low, and the preparation cost is high, so more research on special fields is now difficult to produce and popularize. A new method based on electronic printing process for preparing thin film pyroelectric sensor is proposed. The method overcomes the disadvantages of the prior art and provides a new research direction for the miniaturization, high speed and integrated development of the thermoelectric sensor.