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在聚乙烯醇缩甲醛上分别蒸镀不同厚度的Ａｎ，Ｐｄ和Ａｇ薄膜，用透射电镜研究其成膜过程显微结构的变化和特征。结果表明，虽然三种金属膜形成过程（形成临界核之后）都存在成岛、岛长大与联并、网络结构及连续膜形成等阶段，但它们的小岛密度不同，Ｐｄ较高，Ａｕ居中，Ａｇ较小。它们在基底膜表面台阶处有小岛的装饰效应。三种金属膜在厚度小于０．３～０．４ｎｍ时为无定形结构，随着膜厚增加，转变为多晶结构。由多品金膜标定仪器常数Ｌλ值，从实验结果计算得到Ｐｄ和Ａｇ的晶格常数与标准值基本一致。用扫描隧道显微镜观察这三种金属膜的表面形貌，结果表明，当它们厚度相近时，其晶粒大小不同，Ｐｄ较小，Ａｇ较大，ＡＵ居中。
The films of An, Pd and Ag with different thicknesses were deposited on the polyvinyl formal respectively. The changes and characteristics of the microstructures during the film formation were investigated by transmission electron microscopy. The results show that although the formation of three metal films (after the formation of the critical nucleus) is characterized by the stages of islets, island growth and union, network structure and continuous film formation, their islets have different densities, higher Pd, and Au Center, Ag smaller. They have a decorative island effect on the surface of the basement membrane. Three kinds of metal film in the thickness of less than 0.3 ~ 0.4nm amorphous structure, with the film thickness increases, transformed into a polycrystalline structure. Multi-product gold film calibration instrument constant Lλ value calculated from the experimental results of the lattice constant of Pd and Ag are basically the same with the standard value. The surface morphology of these three kinds of metal films was observed by scanning tunneling microscopy. The results showed that when their thicknesses are similar, the grain sizes are different, Pd is smaller, Ag is larger, and AU is centered.