论文部分内容阅读
针对真空泵抽速测量中广泛应用的普通滴管式气体流量测量装置与方法进行改进研究,提出一种基于称重原理的滴管式气体流量测量新方法。在贮液槽下安置电子称,以称量进入滴管中的油液的质量来代替测量液位上升的高度;推导出对应的气体流量计算公式,介绍了具体操作步骤;对照原测量方法的不足之处,分析了称重法滴管式气体流量测量装置与方法的特点。这一改进可为实现真空泵抽速及微小气体流量的自动化测量提供理论支撑和参考方法。
In order to improve the general dropper-type gas flow measurement device and method widely used in the pumping speed measurement of vacuum pump, a new method for measuring the droplet gas flow rate based on the weighing principle is proposed. The electronic weighing is placed under the liquid storage tank to weigh the quality of the oil entering the pipette instead of the height of the liquid level rise; the corresponding gas flow calculation formula is deduced, and the concrete operation steps are introduced; Deficiencies, analysis of the weighing method pipette gas flow measurement device and method characteristics. This improvement can provide theoretical support and reference method for the automatic measurement of pumping speed and gas flow of vacuum pump.