论文部分内容阅读
针对无磨料低温抛光中冰盘会出现倾斜、引起加工过程的振动问题,对冰盘与工件盘的水平面内的相对运动进行了分析。对冰盘倾斜时,工件盘的纵向运动进行了建模,得到了冰盘与工件盘的偏心及冰盘的倾角越大,振动的幅值越大的影响规律,提出了抛光前对冰盘进行修整来消除振动的解决方案。通过对石英晶体的抛光实验,证实了这种方法的可行性,最终达到了粗糙度为0.53nm的超光滑表面。
For the non-abrasive low temperature polishing, the ice tray will appear inclined, causing the vibration of the process, and analyzing the relative movement in the horizontal plane between the ice tray and the workpiece tray. When the ice tray is tilted, the longitudinal movement of the workpiece tray is modeled. The influence of the eccentricity of the ice tray and the workpiece tray and the greater the inclination of the ice tray are obtained, and the larger the amplitude of the vibration is, Trim to eliminate vibration solution. Through the experiment of quartz crystal polishing, it proved the feasibility of this method and finally reached an ultra-smooth surface with a roughness of 0.53nm.