利用高能离子注入技术系统地研究了不同剂量、不同种类离子注入对Ｃ６０薄膜结构的影响，并利用Ｒａｍａｎ光谱对其结构进行分析．结果表明：中等能量的离子注入会影响Ｃ６０薄膜的结构，使Ｃ６０分子薄膜产生聚合和非晶碳化现象，但上述现象的出现与注入离子的剂量大小有关，并存在一注量阈值，只有在此阈值之上，Ｃ６０薄膜结构才发生改变，研究表明这与注入离子同Ｃ６０分子之间互作用方式有关 The effect of different dose and different kinds of ion implantation on the structure of C60 thin film was systematically studied by using high energy ion implantation technology. The structure of C60 thin film was analyzed by Raman spectroscopy. The results show that medium energy ion implantation can affect the structure of C60 thin film and cause C60 molecular film to polymerize and amorphous carbonize. However, the appearance of these phenomena is related to the dose of implanted ions and there is a threshold of injection. Above the threshold, the C60 thin film structure changes, studies have shown that this is related to the interaction between the implanted ions and C60 molecules