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利用具有纳焦能量、高重复频率的偏振光飞秒双脉冲对金属铬膜样品进行微加工,样品表面都会产生微突起状结构,它们的宽度在0～400 ps的双脉冲时延范围内没有明显的变化,但高度却都在1～10 ps的双脉冲时延范围内呈现明显的下降,在此时延范围之外并没有明显的变化。通过加工样品的扫描电子显微镜(SEM)图片发现,对于偏振光,利用双脉冲方法,可以获得更好的加工质量。并且线偏振光得到的微突起状结构比较细长,在入射光束的偏振方向上有所伸长;圆偏振光得到的微突起状结构比较接近圆形。即在低脉冲能量、高重复频率情况下,具体的微加工特征形貌与入射光束的偏振状态有关。
Micro-processing of the samples of chrome metal films with polarized femtosecond pulses with nanofocus energy and high repetition rate resulted in microprojections on the surface of the samples. The width of them was within the range of 0 ~ 400 ps double pulse delay Obvious changes, but the height is obviously decreased within the range of 1 ~ 10 ps double-pulse delay. There is no obvious change beyond this delay range. Scanning electron microscopy (SEM) images of processed samples show that for polarized light, better processing quality can be achieved with the double pulse method. The microprojection structure obtained by linearly polarized light is relatively slender and elongated in the polarization direction of the incident light beam. The microprojection structure obtained by circularly polarized light is relatively close to a circle. That is, under the conditions of low pulse energy and high repetition rate, the specific micro-machined feature morphology is related to the polarization state of the incident beam.