离子注入是在高真空下以一定的能量将离子注入金属材料表面的一种技术,可明显地提高金属的耐磨性、耐疲劳性、表面硬度、耐蚀性及抗高温氧化性。与常规的整体合金化方法及扩散渗透、镀层等表面处理相比较,离子注入法有不受热力学平衡相图、扩散规律限制,节约合金原料及不存在明显界面等突出的 Ion implantation is a technology that injects ions into the surface of a metal material with a certain energy under a high vacuum and can obviously improve the wear resistance, fatigue resistance, surface hardness, corrosion resistance and high temperature oxidation resistance of the metal. Compared with the conventional overall alloying method and the surface treatment such as diffusion infiltration and plating, the ion implantation method is not subject to the thermodynamic equilibrium phase diagram, the diffusion rule, the saving of the alloy material and the absence of the obvious interface