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以一种液压用微机械压力传感器为研究对象,在分析其结构和工作原理基础上,提出了固有频率对加工误差的灵敏度分析方法,得到了对微机械压力传感器固有频率影响较大的尺寸参数,为后续优化和实际加工提供了可控参考。为提高微机械压力传感器的加工稳定性和性能指标,进行了微机械压力传感器结构稳健优化设计,推导了稳健性能约束条件,提出了设计变量、目标函数、尺寸约束条件和模态性能约束条件,建立了微机械压力传感器结构稳健优化的数学模型。稳健优化结果表明,微机械压力传感器的加工稳定性和灵敏度都有了较大提高。进行了实际加工和测试,测试结果表明稳健优化后的微机械压力传感器具有较高的灵敏度。
A kind of hydraulic micro-mechanical pressure sensor is taken as the research object. Based on the analysis of its structure and working principle, a sensitivity analysis method of the natural frequency to the machining error is proposed. The dimensional parameter which has a great influence on the natural frequency of the micro-mechanical pressure sensor , Which provides a controllable reference for subsequent optimization and actual machining. In order to improve the processing stability and performance of MEMS pressure sensor, the robust optimization design of MEMS pressure sensor was carried out, and the robust performance constraints were derived. The design variables, objective functions, dimensional constraints and modal performance constraints were proposed. The mathematical model of the robust optimization of the structure of the micromechanical pressure sensor is established. Robust optimization results show that the machining stability and sensitivity of MEMS pressure sensors have been greatly improved. The actual machining and testing are carried out. The test results show that the robustly optimized micromechanical pressure sensor has higher sensitivity.