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柔性聚酯膜衬底薄膜电池通过激光刻蚀等工艺形成集成串联,激光刻蚀柔性薄膜太阳电池复合背反射层(Ag/ZnO)是其中的重要工艺。首先对聚酰亚胺(PI)、Ag、ZnO材料的光学特性进行了分析,然后采用1 064nm脉冲激光与532nm脉冲激光分别对柔性薄膜太阳电池复合背反射层进行刻蚀研究。通过改变重复频率、激光功率、扫描速度和焦点位置等参数,分析了激光刻蚀物理机制,获得了好的刻蚀效果。结果表明,1 064nm纳秒脉冲激光更适合刻蚀柔性PI衬底复合背反射层Ag/ZnO,在激光功率860mW、刻蚀速度800mm/s和重复频率50kHz下,获得了底部平整、两侧无尖峰的刻线,刻线宽为32μm,满足柔性薄膜太阳电池集成串联组件的制备工艺要求。
Flexible polyester film-based thin-film battery through laser etching process to form an integrated series, laser etching flexible thin-film solar cell composite back reflector (Ag / ZnO) is one of the important processes. Firstly, the optical properties of polyimide (PI), Ag, ZnO materials were analyzed. Then the composite back-reflection layer of flexible thin film solar cell was etched by using 1 064nm pulsed laser and 532nm pulsed laser respectively. By changing the parameters of repetition frequency, laser power, scanning speed and focal position, the physical mechanism of laser etching was analyzed and a good etching effect was obtained. The results show that 1 064 nm nanosecond pulsed laser is more suitable for etching the Ag / ZnO composite substrate with flexible substrate. The laser beam power of 860 mW, the etching rate of 800 mm / s and the repetition frequency of 50 kHz are obtained. The peak of the engraved line width of 32μm, to meet the flexible thin film solar cells integrated tandem assembly preparation process requirements.