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本文叙述了盖得的发明专利,从初期的汞扩散泵到分馏油扩散泵的演变过程。讨论了泵体结构、喷咀型式、泵油性能和几个关键技术问题。现代油扩散泵的何氏系数达0.65以上,返油率达10-5 mg/cm2.min,1 kW功率抽气量可达200 Pa L/s。最后对泵的性能、结构和应用前景作了展望。
This article describes Ged’s invention patent, from the initial mercury diffusion pump to fractionated oil diffusion pump evolution. Discusses the pump structure, nozzle type, pump oil performance and several key technical issues. The modern oil diffusion pump has a Ho coefficient of more than 0.65 with an oil return rate of 10-5 mg / cm2.min and a power draw of 1 kW up to 200 Pa L / s. Finally, the performance, structure and application prospect of the pump are prospected.