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大规模集成电路及半导体材料的研制工艺过程中,需要超纯水及试剂,结合我国具体情况,对其纯度提供系统的数据是非常必要的。国外文献对于超纯水、试剂的提纯、保存容器以及测定方法已有报导。我们采用无火焰原子吸收法-石墨炉及自制钽舟原子化器,在实验室没有净化条件,试样分析不经任何化学处理及浓縮的情况下,对超纯水、过氧化氢、氨水、丙酮、丁酮、环己酮、乙醇、盐酸、硝酸中钠、铁、铜的测定条件及提纯等(提纯不包括氨水和过氧化氢)做了一些工作。在国内尚未有类似报导。无火焰原
Large-scale integrated circuits and semiconductor materials in the development process, the need for ultra-pure water and reagents, combined with the specific circumstances of our country, its purity to provide systematic data is necessary. Foreign literature for ultrapure water, reagent purification, storage containers and determination methods have been reported. We use non-flame atomic absorption method - graphite furnace and homemade tantalum boat atomizer, no purification conditions in the laboratory, the sample analysis without any chemical treatment and concentration of cases, the ultra-pure water, hydrogen peroxide, ammonia , Acetone, butanone, cyclohexanone, ethanol, hydrochloric acid, nitric acid, sodium, iron and copper determination conditions and purification (not including ammonia and hydrogen peroxide purification) to do some work. There are no similar reports in China. No flame original