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提出了一种基于X射线光栅像衬成像技术的光栅品质无损检测方法.我们发现利用传统的吸收信号很容易检测到光栅电镀缺陷,而由非均匀紫外曝光导致的光栅缺陷则可以通过相衬信号进行检测.实验结果证明,在一种利用实验室光源同时产生吸收信号和相位信号的大视场实验平台上,X射线相位衬成像技术可以很好地运用到光栅缺陷的快速检测以及其他类似的电刻产品的品质检测上.
A new grating quality non-destructive inspection method based on X-ray grating imaging technology is proposed.It is found that grating defects can be easily detected by traditional absorption signals while grating defects caused by non-uniform UV exposure can be detected by phase contrast signals The experimental results show that the X-ray phase contrast imaging technique can be applied to the rapid detection of grating defects and other similar large field experiments in a large field experiment platform that uses laboratory light source to generate both absorption signal and phase signal simultaneously. Electric engraved product quality testing.