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本文提出一个简单而精确的逼近膨胀系统内终气压的公式和计算系统体积比的方法,曾在一个10-1托到50托范围的标定系统上使用多年其精确度优于1%。对最常用的近似公式进行了分析。指出其应用的局限性。
This paper presents a simple and accurate method to approximate the final gas pressure in an expansion system and to calculate the volumetric ratio of the system. The accuracy is better than 1% when used on a calibration system ranging from 10-1 torr to 50 torr over many years. The most commonly used approximation formula is analyzed. Point out the limitation of its application.