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压电晶体阀是真空充气系统中一种微流量充气阀门。它具有流量小、开启快、可以远程控制等优点,但压电阀门的进气量难以用函数的方式准确描述,而且随着使用时间的增长往往有改变。本文介绍了一种PV 10型阀门的性能测定方法和结果,为HT 7托卡马克聚变装置中性束注入器系统离子源和中性化室充气量确定提供了参考数据。
Piezoelectric crystal valve is a kind of micro-flow inflatable valve in vacuum inflation system. It has a small flow, open fast, remote control, etc., but the piezoelectric valve intake is difficult to accurately describe the function of the way, but with the growth of the use of time are often changed. This paper presents a method and result of the performance measurement of a PV 10-type valve, which provides reference data for determining the inflator capacity of the ion source and the neutralization chamber of the neutral toothed injector system of the HT 7 tokamak fusion device.