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当用串列加速器加速重离子时,用固体剥离膜代替气体剥离器,可获得较高的电荷态,从而提高离子束能量。我们用直流辉光放电裂解乙烯法研制成松弛碳剥离膜,供HI-13串列加速器使用。制备碳剥离膜的设备由DM-450A镀膜机改装而成。在该机器的金属真空室内,安装φ260mm的阴极和阳极,极间距离为140mm;镀膜机的离子轰击电源用作辉光放
When a tandem accelerator is used to accelerate heavy ions, a solid release film can be used instead of a gas stripper to obtain a higher charge state, thereby increasing ion beam energy. We developed a relaxed carbon release film using DC Glow Discharge Ethylene for the HI-13 Tandem Accelerator. Preparation of carbon stripping film equipment modified by DM-450A coating machine. In the metal vacuum chamber of the machine, a φ260 mm cathode and an anode were installed with a distance between the electrodes of 140 mm; the ion bombardment power supply of the coating machine was used as a glow discharge