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本文是利用多晶硅压阻效应,研制出数字输出式压力传感器,并利用软、硬件技术进行温漂和非线性补偿,经A/D转换,实现数字量输出。
This article is the use of polysilicon piezoresistive effect, developed a digital output pressure sensor, and the use of soft and hardware technology for temperature drift and nonlinear compensation, the A / D conversion to achieve digital output.