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本文介绍了采用温度补偿来保证激光器和扫描干涉仪腔长的稳定性,以提高仪器的性能和精度。同时还介绍了测量腔长的温度稳定性的两种方法——多光束干涉法和扫描干涉法。
This article describes the use of temperature compensation to ensure the stability of the laser and scanning interferometer cavity length to improve the performance and accuracy of the instrument. Two methods to measure the temperature stability of cavity length are also introduced - multi-beam interferometry and scanning interferometry.