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厚膜压力传感器具有优良的性能和广阔的应用前景。厚膜浆料的研究在传感器研制中超着非常重要的作用。本文主要讨论表征浆料物化特性、工艺配方的几个重要参数(导电相的浓度和颗粒度,玻璃粉的粒度与化学组成)对厚膜电阻 R、GF 和 TCR 的影响。同时,借助于 SEM 和 XRD 等分析手段,对厚膜电阻的导电机理、力敏特性与浆料物化特性之间的关系也进行了一些探讨。
Thick film pressure sensor has excellent performance and broad application prospects. The research of thick film paste is very important in the development of the sensor. This paper mainly discusses the influence of several important parameters (concentration and particle size of conductive phase, particle size and chemical composition of glass frit) on the thick film resistance R, GF and TCR which characterize the physicochemical properties of the slurry and the process recipe. At the same time, with the help of SEM and XRD, the relationship between the conductive mechanism, force-sensitive property and slurry physicochemical properties of thick-film resistor has also been discussed.