Study of titanium nitride for low-e coating application

来源 :科学通报(英文版) | 被引量 : 0次 | 上传用户:man168176
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
The paper reports our novel work on chemical vapor deposition coating of titanium nitride (TiN) thin film on glass for energy saving. TiN films were deposited on glass substrates by atmospheric pressure chemical vapor deposition (APCVD) using titanium tetrachloride (TiCl4) and ammonia (NH3) as precursors. As a result,TiN films with a thickness of 500 nm were obtained. X-ray diffraction (XRD),scanning electron microscopy (SEM),atomic force microscopy (AFM),four-point probe method and optical spectroscopy were respectively employed to study the crystallization, microstructure,surface morphology,electrical and optical properties of the coated TiN films. The deposited TiN films are of NaCl structure with a preferred (200) orientation. The particles in the film are uniform. The reflectivity of the TiN coating in the near-infrared (NIR) band can reach over 40%,the visible transmittance is approximately 60%,and the visible reflectivity is lower than 10%. The sheet electrical resistance is 34.5 Ω. According to Drude theory,the lower sheet resistance of 34.5 Ω gives a high reflectivity of 71.5% around middle-far infrared band. The coated films exhibit good energy-saving performance.
其他文献
研究了以负载于酸性氧化铝上的酞菁镍为催化剂,分子氧为氧化剂,异丁醛为助氧化剂,由环己烯经催化环氧化制备环氧环己烷的工艺过程.制备了金属酞菁催化剂NiPc/Al2O3,并利用红
Molecular sieves with different acidities and pore-sizes have been applied to catalyze the acetalization and ketalization of carbonyl compounds with glycol. A c
The goal in reinforcement learning is to learn the value of state-action pair in order to maximize the total reward. For continuous states and actions in the re
To study the effect of long chain molecule and surface active agent on non-Newtonian fluid properties, rheological experiments on two different fluids have been
This study investigates a novel method to numerically generate orthogonal ultrawide band (UWB) shaping pulses based on compressed chirp signal. First, a pulse t
The microencapsulated polyethylene glycol (PEG)with different molecular weight by a fluidized coating method has been prepared and the crystallization behaviors
评述了以往与ψ(3770)非D(D)衰变相关的实验测量与研究,详细讨论了三种寻找非D(D)衰变的实验方法,即遍举、半单举和单举方法.这些方法对于在实验上寻找ψ(3770)非D(D)衰变具
Na+/H+ antiporters (NHX) are ubiquitous transmembrane proteins that play a key role in salt tolerance of plants. In this study,the sequence of 3 Arabidopsis NHX
The factors affecting one dimensional (1D) and two dimensional (2D) photonic crystals (PhCs) are systemically analyzed in this paper by numerical simulation.Tra
Placement and wiring of vast amount of sensor elements on the 3-dimensionally configured robot surface to form soft sensor skin is very difficult with the tradi