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提出傅里叶功率谱法评价分辨率标板极限分辨率值的理论判据。这是一种用光学信息处理原理对标板图案傅里叶谱进行分析处理的客观评价方法。文中建立了与分辨率标板图案相适应的傅里叶谱数学模型 ,并通过对傅里叶谱的理论计算和分析找出了标板图案分辨率值与功率谱图各次极大之间的关系。
The theoretical criterion for evaluating the limit resolution of resolution target by Fourier power spectrum method is proposed. This is an objective evaluation method for analyzing and processing the Fourier spectrum of the target pattern with the principle of optical information processing. In this paper, the mathematical model of Fourier spectrum which is compatible with the resolution standard plate pattern is established. Through the theoretical calculation and analysis of the Fourier spectrum, the resolution value of the target plate pattern and the maximum power spectrum are found Relationship.