一、引言 作为电子光学仪器的一支,近廿年来,扫描电子显微镜(SEM)的发展非常迅速,在数量上已比原来占优势的透射式电子显微镜遥遥领先。这一方面是由于SEM具有优越的性能,还由于它便于作为一种廉价的仪器而得到普及。 初期的SEM是一种采用二次电子成象的图象观察仪器,具有200(?)～300(?)的分辨能 I. INTRODUCTION As a part of electronic optical instruments, the development of scanning electron microscope (SEM) has been very rapid in recent 20 years, which is far ahead of the original quantity of transmission electron microscope. This is due in part to the superior performance of the SEM and its popularity as a cheap instrument. The initial SEM is a use of secondary electron imaging image observation apparatus, with 200 (?) ~ 300 (?) Resolution