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矢量传声器的核心组成器件是质点振速传感器,该传感器具有与频率无关的‘8’字指向性。本文在分析空气声质点振速传感器工作原理基础上,采用数值分析方法系统研究了质点振速传感器中敏感头桥式结构尺寸、热扩散和材料比热容等参数对频率响应的影响,着重分析了质点振速传感器最优灵敏度和低通滤波器效应。根据优化设计结果,采用MEMS工艺技术加工出敏感头桥式结构,并测试了0℃条件下Pt的电阻值R和热阻温度系数θ,以及传感器的频响曲线和‘8’指向性。实验结果表明:空气声质点振速传感器具有良好的声学性能。
The core component of vector microphones is a particle velocity transducer that has a frequency-independent ’8’ word directivity. Based on the analysis of working principle of air acoustical vibration sensor, numerical analysis method is used to systematically study the influence of sensitive head bridge structure size, thermal diffusivity and specific heat capacity on frequency response in particle velocity sensor, Optimal Sensitivity of Vibration Sensor and Low Pass Filter Effect. According to the result of optimization design, MEMS technology was used to fabricate the sensitive head-bridge structure. The resistance value R and the temperature coefficient of resistance θ of Pt at 0 ℃ and the frequency response curve and the ’8’ directivity of the sensor were tested. The experimental results show that the air acoustics vibration sensor has good acoustic performance.