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本文设计了一种新型全息光学测头,这种测头通过新型全息光学元件(NHOE),将被测表面的两个测点的信息综合在一个接收器上,利用自补偿原理,消除了被测表面相对光轴倾斜对测量结果的影响。
In this paper, a new type of holographic optical probe is designed. This kind of probe integrates the information of two measuring points of the surface to be measured by a new holographic optical element (NHOE) on a receiver. By using self-compensation principle, Measuring the surface relative to the optical axis tilt of the measurement results.