本文所用的测试方法为蓝宝石介质谐振器法,它采用一片超导薄膜替代谐振器的一端,通过测量微波介质谐振腔的品质因数和谐振频率随温度变化来确定超导薄膜的微波表面阻抗.本文设计和制作了一个工作于TE01δ模式,谐振频率在18.3GHz左右的蓝宝石介质谐振器,其无载品质因数在3K时可达到130000.用此方法可以对薄膜进行无损伤测量,测量后的薄膜还可继续使用. The test method used in this paper is the sapphire dielectric resonator method, which uses a superconducting thin film instead of one end of the resonator and determines the microwave surface impedance of the superconducting thin film by measuring the quality factor and the resonant frequency of the resonant cavity. A sapphire dielectric resonator operating in the TE01δ mode with a resonant frequency of about 18.3GHz was designed and fabricated with an unloaded quality factor of 130,000 at 3K.The film can be measured without damage using this method and the measured film thickness Can continue to use.