一、引 言 利用超声波具有的特异现象可以开发各种装置,其应用范围日益扩大。超声波清洗机和超声波加工机,作为直接利用超声波能量的一种技术,是最早实用化的。后来利用大功率能量可以集中这一事实,又出现了超声波焊接机。这些机器使用的超声波振子,由于压电陶瓷和铁氧体磁致伸缩材料的出现而取得显著的进步,高性能的小型振子巳经开发出来和实用化。 I. INTRODUCTION Various devices can be developed by using the special phenomena that ultrasonic has. Their applications are expanding. Ultrasonic cleaning machines and ultrasonic machines, as a direct use of ultrasonic energy is a technology, is the earliest practical. Later, the use of high-power energy can focus on the fact that there has been an ultrasonic welding machine. Ultrasound vibrators used in these machines have made significant progress due to the appearance of piezoelectric ceramics and ferrite magnetostrictive materials, and high-performance small vibrators have been developed and put into practical use.