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采用磁控溅射法,以Cr、Ti和石墨为靶材,Ar、N2和CH4为溅射气体,在材料为20CrMo的发动机挺柱上利用多层梯度复合技术沉积了低摩擦类金刚石(DLC)薄膜复合层CrTi/CrTiN/CrTiC/DLC。该薄膜复合层的纳米压痕硬度高达13GPa,结合力为50N,表面粗糙度为0.398nm。在SRV-IV微动摩擦磨损试验机上进行耐磨损试验后,DLC复合薄膜挺柱的磨损率为渗碳挺柱的1/6。该研究技术具有自主知识产权,实现了挺柱批量化覆膜加工,并有望在发动机主要摩擦副上推广应用。
Using magnetron sputtering method, Cr, Ti and graphite as target material, Ar, N2 and CH4 as sputtering gas, the material of 20CrMo on the engine tappet using multilayer gradient composite technology deposited low-friction diamond ) Thin film composite layer CrTi / CrTiN / CrTiC / DLC. The nano-indentation hardness of the film composite layer is up to 13 GPa, the binding force is 50 N, and the surface roughness is 0.398 nm. Wear resistance test on the SRV-IV fretting friction and wear testing machine, DLC composite film tappet wear rate of carburizing tappet 1/6. The research technology with independent intellectual property rights, to achieve the tappet batch coating processing, and is expected to promote the application of the main friction on the engine.