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提出一种用于V型和Z型电热微驱动器性能比较的拓扑结构和标准,建立了在真空工作环境下V型和Z型电热微驱动器系统分析与比较模型.有限元仿真分析和实验结果验证了分析模型的准确性和有效性.借助此分析模型及所提出的性能比较拓扑结构和标准,综合分析和比较了V型和Z型电热微驱动器随不同结构参数变化时输出位移和力性能,为V型和Z型电热微驱动器的合理选择、系统设计与分析提供了可靠和实用的指导.
A topological structure and standard for comparing the performance of V-type and Z-type electric micro-drivers are proposed, and the system analysis and comparison model of V-type and Z-type micro-actuators under vacuum working condition are established.FEM simulation and experimental verification The accuracy and the validity of the model are analyzed.Based on the analysis model and the proposed performance comparison topologies and standards, the output displacement and force performance of V-type and Z-type micro-actuators with different structural parameters are analyzed and compared. For the V-type and Z type electric micro-drive reasonable choice, system design and analysis provides a reliable and practical guidance.