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研究了双层辉光离子W-Mo共渗时，提供合金元素的W-Mo合金源极的表面成分和形貌变化．结果表明：在氩离子的轰击下，W-Mo合金源极表面在在明显的择优溅射，在稳定态达到之前有一定的过渡期，并最终形成一定成分范围的微循环择优溅射．
The surface composition and topography of the W-Mo alloy source with alloying elements were studied during double W-Mo doping. The results show that under the argon ion bombardment, the source surface of W-Mo alloy is obviously preferentially sputtered and has a certain transitional period before the steady state is reached, and finally the micro-cycle preferential sputtering with a certain composition range is formed.