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应用相移干涉术测量物体表面微观形貌时,相移器的移相误差直接影响测量精度。在四帧干涉图情形下,推导出了对移相误差不敏感的相位解算方法。算法将相移误差因子作为中间可代换变量,它的大小随机变化不影响相位计算结果,即相位计算式与相移误差因子无关。对标准正弦样板进行的实验验证表明,该算法有效地抑制了移相误差对形貌测量的影响,进一步提高了表面微观形貌的测量精度和测量可靠性、提高了测量系统的整体性能指标。
When using the phase-shift interferometry to measure the microstructure of the object surface, the phase-shift error of the phase shifter directly affects the measurement accuracy. In the case of four-frame interferogram, the phase solution method which is insensitive to phase shift error is deduced. The algorithm takes the phase shift error factor as the intermediate substitutable variable. Its random change in size does not affect the phase calculation, that is, the phase calculation formula is independent of the phase shift error factor. The experimental verification of the standard sine model shows that this algorithm can effectively restrain the effect of phase error on the measurement of topography, further improve the measurement accuracy and measurement reliability of the surface microstructure, and improve the overall performance of the measurement system.