玻璃钝化由于具有高可靠性和稳定性,被广泛用于高反压大功率三极管的台面钝化.目前,形成钝化膜的方法主要有电泳法、阴极溅射法、离子沉淀法、汽相淀积法和“博士”,刀片法等几种方法.电泳法虽然工艺比较复杂,但由于它选择性强,膜厚容易控制,一致性好,光刻兼容容易等特点而被广泛使用. Due to its high reliability and stability, glass passivation is widely used for countertop passivation of high-voltage high-power transistors.At present, the methods for forming passivation films include electrophoresis, sputtering, ion-deposition, Phase deposition method and “Dr.”, blade method, etc .. Although the electrophoretic method is more complex, but because of its selective, easy to control the thickness, good consistency, lithography compatibility and other characteristics are widely used.