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直接比对法是氦质谱检漏仪在稳定工作和引入气体相同条件下,将参考漏孔流出的氦气和标准漏孔提供的已知流量的氦气分别引入校准室中,用氦质谱检漏仪分别测量氦气产生的离子流,通过比较两次离子流的测量值计算出参考漏孔漏率的一种校准方法。这种校准范围为1×10-7Pa.m3/s~1×10-10Pa.m3/s。对同一参考漏孔,采用同样的校准测量,可以采用高斯分布统计的方法获得校准不确定度,其他不确定度分量由氦质谱检漏仪组成的校准装置决定,其合成相对不确定度可达到10%。
Direct comparison method is a helium mass spectrometer leak detector in the stable working conditions and the introduction of gas under the same conditions, the reference leak out of the helium gas and standard leak provided by the known flow of helium were introduced into the calibration chamber, with helium mass spectrometry The leak meter measures the ion flow generated by helium separately and calculates a calibration method for the leak rate of the reference leak by comparing the measured values of the two ion flows. This calibration range is 1 × 10-7 Pa.m3 / s to 1 × 10-10 Pa.m3 / s. Using the same calibration measurements for the same reference leak, the calibration uncertainty can be obtained using Gaussian distribution statistics. Other uncertainty components are determined by the calibration device consisting of a helium mass spectrometer leak detector with a relative relative uncertainty of approximation 10%.