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我们首次研制出恒定芯片温度(CCT)式集成流量传感器后进行了有关该传感器的性能改善和实用化方面的工作。本文介绍把外接电阻和取样电阻等外接元件均集成在一个芯片上的全集成式流量传感器。 CCT型流量传感器共三大部分(在同一芯片上),其中A表示运放。流体流过芯片
The first time we developed a constant chip temperature (CCT) integrated flow sensor, we performed work on the sensor’s performance improvement and practicality. This article describes a fully integrated flow sensor that integrates external components such as external resistors and sample resistors on a single chip. CCT-type flow sensor consists of three major parts (on the same chip), where A represents the op amp. Fluid flows through the chip