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在离轴非球面反射镜研磨后期和粗抛光阶段,被测反射镜面形与理想面形存在着较大的偏差,表面反射率较低,采用干涉测量会因局部区域干涉条纹过密或条纹对比度过低,造成普通干涉仪无法进行全口径测量,而普通接触式轮廓仪测量精度此时已经不能满足加工要求。鉴于Shack-Hartmann波前传感器较大的动态范围和较高的测量精度,提出了采用Shack-Hartmann波前传感器非零位在轴检测离轴非球面面形,研究了该方法的检测原理并搭建了检测系统,分析了系统误差来源,并制作了用于在轴检测离轴非球面的参考波前,对两个不同加工精度的离轴非球面反射镜进行了测量,并与干涉仪的测量结果进行了对比。对比结果表明,Shack-Hartmann波前传感器的测量结果是正确可靠的,并且可以弥补轮廓仪测量和干涉仪测量的不足,从而证明了采用Shack-Hartmann波前传感器在轴检测离轴非球面的可行性和正确性。
In the off-axis aspherical mirror grinding stage and the rough polishing phase, the measured reflector shape and the ideal surface shape there is a big deviation, the surface reflectance is low, the interference measurement will be due to the interference of local interference fringes or stripe contrast Too low, resulting in ordinary interferometer can not be full aperture measurement, and ordinary contact profiler measurement accuracy can not meet the processing requirements at this time. In view of the larger dynamic range and higher accuracy of the Shack-Hartmann wavefront sensor, a non-zero Shack-Hartmann wavefront sensor is used to detect the off-axis aspherical shape on the shaft. The detection principle of this method is established and built The detection system was analyzed, the source of system error was analyzed, and the reference wavefront used to detect the off-axis aspheric surface was made. The two off-axis aspheric mirrors with different processing precision were measured and compared with the interferometer measurement The results are compared. The comparison results show that the measurement results of the Shack-Hartmann wavefront sensor are correct and reliable, and can make up for the lack of profilometer measurement and interferometer measurement, which proves the feasibility of using the Shack-Hartmann wavefront sensor to detect the off-axis aspheric surface on the shaft Sexuality and correctness.